| 摘要 |
PURPOSE:To simplify measurement by storing model information showing the relation between the tilt angle of a sample against the irradiation direction of an electron beam which is previously obtained and the intensity of secondary electron generated from the surface of the sample in a computer. CONSTITUTION:In a surface shape inspecting device, a model curve showing the relation between the tilt angle of the sample 5 against the irradiation direction of the electron beam 2 and the intensity of the secondary electron 6 generated from the surface of the sample 5 at that time is obtained and stored in the computer 11 as a table. Thereafter, the sample 5 is irradiated with the electron beam 2 as usual and the secondary electron 6 generated from the surface of the sample 5 is detected as an analog signal by a secondary electron detector 7, then it is stored as an image in an image memory 10 through an A/D converter 9 in an image processor 8. Thus, the cross-sectional shape of the surface of the sample, which has a very smooth surface shape, can be easily measured without performing a complicated enormous calculation. |
