| 摘要 |
<p>PURPOSE:To enable high precision trimming by providing trimming start position aligning and stop position aligning patterns integrally with a resistance value adjusting patterns and supplying trimming start position and stop position information for laser light to a trimming device as an input. CONSTITUTION:A trimming start position aligning pattern 4 is formed in a projecting shape at the trimming start position of a resistance value adjusting pattern 2, and a trimming stop position aligning pattern 5 is formed in a projecting shape at the position on the extension of the trimming stop position, determined by the trimming movement amount in the trimming direction, outside the resistance value adjusting pattern 2. Laser light is applied to a position at a distance of several tens of mum before the input position in the trimming start position aligning pattern 4, and this laser light is moved by a distance determined by the trimming movement amount positioned in the trimming stop position aligning pattern 5 to form a trimming trace 6 to adjust the resistance value of the resistance value adjusting pattern 2. Thus, position setting with a smaller error can be achieved and high precision trimming is enabled.</p> |
