| 摘要 |
PURPOSE:To make a pump fully protectable even at time of power failure or the like by saving an operating state of the pump and the present time in an auxiliary memory periodically through a computer. CONSTITUTION:An operating state of a turbo-molecular pump 3 and the present time are periodically saved in an auxiliary memory by a general control computer 1 for the whole system. At time of an initial check at system startup, whether the pump 3 is rotated or stopped is judged from the saved state and time and the present time, and thereby such a signal as corresponding to that is outputted. In addition, AND between this signal and a signal being outputted by a pump controller 3A is taken up and inputted into a hard interlock circuit 8. With this constitution, breaking prevention for the pump 3 or reverse-flow prevention of air into the system side at emergency stop is promoted. |
