发明名称 |
Electronically controlled cryopump |
摘要 |
A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
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申请公布号 |
US4918930(A) |
申请公布日期 |
1990.04.24 |
申请号 |
US19880243707 |
申请日期 |
1988.09.13 |
申请人 |
HELIX TECHNOLOGY CORPORATION |
发明人 |
GAUDET, PETER W.;OLSEN, DONALD A.;EACOBACCI, MICHAEL J.;HARVELL, JOHN T.;LEPOFSKY, ROBERT J.;ROCHE, DAVID E.;BENDER, STEVEN A. |
分类号 |
F04B49/06;F04B37/08;F04B37/16;F04D19/04;F04D27/00 |
主分类号 |
F04B49/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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