发明名称 |
Method for producing electrically conductive carbon film |
摘要 |
A carbon film having a larger electrical conductivity is produced on a substrate by an ion beam method comprising steps of ionizing an organic compound having at least one substituent selected from the group consisting of a carbonyl group, an aldehyde group, an acyl group, an acid anhydride group, an amino group, a nitro group, a hydroxyl group, an alkoxyl group, a thiol group and a halogen or a cluster of said organic compound with an ion beam which accelerates ionized species towards a substrate by an electric field and forming a carbon film on the substrate.
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申请公布号 |
US4919779(A) |
申请公布日期 |
1990.04.24 |
申请号 |
US19880233415 |
申请日期 |
1988.08.17 |
申请人 |
DIRECTOR-GENERAL, AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY |
发明人 |
MIZOGUCHI, AKIRA;SHIOYA, JUN;YAMAGUCHI, YOICHI;UEBA, YOSHINOBU |
分类号 |
C01B31/04;C23C14/06;C23C14/22;C23C14/24;C23C14/32;H01L21/203 |
主分类号 |
C01B31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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