Surface grinding apparatus

摘要

A surface grinding apparatus including a plurality of grinding wheel segments which are attached to a lapping platen directly or through an attachment plate so that the working surfaces of the segments form one plane, wherein the surface of a material to be ground is brought into sliding contact with the grinding wheel segments to grind the surface of the material. The grinding wheel segments are arranged so that a plurality of grooves are formed extending in a direction opposite to the advancing direction of the platen from the inner side of the platen toward the outer side thereof and communicate with the outer side of the platen.