| 摘要 |
PURPOSE:To control a wide range of temps. by providing a refrigerant container at the base of a crucible, surrounding the crucible with a cooling net connected to the refrigerant container, and furnishing a heating means on the outside of the net. CONSTITUTION:A heater support 24 is arranged below a crucible holder 14 to surround the crucible 9, and a spiral heater 10 is fixed to the support. The cylindrical refrigerant container 11 is arranged below the heater 10, a cooling block 25 is fixed to the upper end of the container 11, and the lower end of the cooling net 13 of a copper wire, etc., having high heat conductivity is fixed to the protrusion. The net 13 has the inner diameter conforming to the outer diameter of the crucible 9, and the upper end is fixed to the crucible holder 14. A thermocouple 26 is inserted under the crucible 9, and the temp. of the crucible 9 is measured. By this method, the temp. of the vaporization source can be controlled between one hundred and several tens degree Celsius below zero and several hundreds degree. Accordingly, the device can be applied to the vaporization material having the m.p. lower than ordinary temp. with a quick response. |
