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发明名称
GAS-INJECTION STRUCTURE IN SEMICONDUCTOR EPITAXIAL GROWTH APPARATUS
摘要
申请公布号
JPH02111693(A)
申请公布日期
1990.04.24
申请号
JP19880264933
申请日期
1988.10.19
申请人
SHARP CORP
发明人
KIKUTA MITSUHIRO
分类号
C30B25/14;H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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