| 摘要 |
PURPOSE:To simplify the constitution of an alignment optical system and realize highly accurate and high speed alignment by a method wherein rough alignment marks with which the distance and direction to an alignment center can be calculated are provided in a region sufficiently larger than the view of the alignment optical system with a fine alignment mark as their center. CONSTITUTION:A cross mark 10 is provided at a center as a fine alignment mark. Concentric marks 11 are provided concentrically with the center of the cross mark 10, i.e., an alignment center, as the center of concentricity as rough alignment marks. Alignment by using those alignment marks is such that, if the center of the cross mark 10 is in a view F, fine alignment is performed by using the cross mark 10. If the center of the cross mark 10 is not in the view F, the direction and distance to the alignment center can be obtained by the combination of cross points (a)-(d) or (e)-(h) between ridge lines FR and the outer circumference lines and inner circumference lines of the concentric marks. |
