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发明名称
DIFFUSER
摘要
申请公布号
JPH02112228(A)
申请公布日期
1990.04.24
申请号
JP19880263919
申请日期
1988.10.21
申请人
HITACHI LTD
发明人
KAMATA TADASHI
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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