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发明名称
CONTINUOUSLY VAPOR DEPOSITING DEVICE FOR FILM
摘要
申请公布号
JPH02111880(A)
申请公布日期
1990.04.24
申请号
JP19880261560
申请日期
1988.10.19
申请人
MITSUBISHI HEAVY IND LTD
发明人
YANAGI KENICHI;ITANO SHIGEO;TAGUCHI TOSHIO;FURUKAWA HEIZABURO;KAMIKAWA SUSUMU;ITO YOSHIBUMI
分类号
C23C14/02;C23C14/56
主分类号
C23C14/02
代理机构
代理人
主权项
地址
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