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发明名称
CLEANING PROCESS
摘要
申请公布号
JPH02110928(A)
申请公布日期
1990.04.24
申请号
JP19880264655
申请日期
1988.10.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
WASHITANI AKIHIRO;OMORI MASASHI;HORI KOICHIRO
分类号
B08B3/12;H01L21/304
主分类号
B08B3/12
代理机构
代理人
主权项
地址
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