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发明名称
DEVICE FOR MANUFACTURE OF TUNNEL TYPE JOSEPHSON JUNCTION
摘要
申请公布号
JPH02112289(A)
申请公布日期
1990.04.24
申请号
JP19880264014
申请日期
1988.10.21
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
HIDAKA MUTSUO
分类号
H01L39/24
主分类号
H01L39/24
代理机构
代理人
主权项
地址
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