| 摘要 |
<p>PURPOSE:To enable stable detection of a bonding face height by providing a proximity sensor at a vertically moving block with a rotatably set bonding arm. CONSTITUTION:A lever 10 equipped with a bonding arm 4 rotatably mounted at a vertically moving block 3 of a bonding device, a stopper 11 and a sensor detection face 10a both of which are set for the block 3 is integratedly turn around a shaft 2, and a sensor mounting block 13 provided with a proximity sensor 14 mounted thereon, the block 3 and a stopper 12 of the block 3 moves while turning. When a bonding tool 5 at the tip end of the arm 4 is brought into contact with a pellet 21 of a load frame 20, the arm 4 and the lever 10 is stopped in their turning, and the block 3 and a block 13 turns further, then the stopper 12 is spaced from the stopper 11, and at the same time the sensor 14 is spaced from a detection face 10a, and thus stabilization is made in a noncontact manner. As a result, the height of bonding face is detected, whereby good and reliable bonding operation can be done.</p> |
