| 摘要 |
<p>PURPOSE:To certainly remove fine dirts near the brush top and highly improve the cleaning effect by a scrubbing brush by washing the brush with a cleaning solution excited by an ultrasonic vibrator. CONSTITUTION:A spin chuck 10 is rotated to rotate and vibrate A a scrubbing brush 30, and a cleaning solution is injected through a built-in nozzle to conduct cleaning. At the time of completion, a scanner 34 moves the brush 30 upward, the rotation of the chuck 10 is stopped, a cup 20 is lowered, and then the brush 30 is vibrated B and moved to a cleaning vessel 40. The brush 30 is lowered and dipped in the cleaning solution in the vessel 40. An ultrasonic vibrator 50 is driven, and fine dirts on the brush top are certainly washed by ultrasonic washing. According to this constitution, as the contamination of the brush itself can be prevented, the washing effect by the scrubbing brush is remarkably improved.</p> |
