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发明名称
MANUFACTURE OF HETEROEPITAXIAL FILM
摘要
申请公布号
JPH02109320(A)
申请公布日期
1990.04.23
申请号
JP19880260447
申请日期
1988.10.18
申请人
NEC CORP
发明人
ISHIDA KOICHI
分类号
H01L29/205;H01L21/20;H01L21/203
主分类号
H01L29/205
代理机构
代理人
主权项
地址
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