| 摘要 |
PURPOSE:To confirm a changed part when one part of design data is changed by providing a referring data developing part in a data comparison type inspection device. CONSTITUTION:For the constitution of the design data comparison type inspection device, a referring data developing part 10 to decompose only a changed pattern, out of the design data, to a picture element and to digitize the pattern and a display part 9 to display referring data as well are added. Thus, when the design data are changed, checking is executed by using data for check before the change. Then, when the changed part is detected as a defect, the changed part can be conformed by displaying the referring data on the display part 9. |
