STABILIZATION OF INSULATION FILM,申请号JP19880261952-传众专利搜索

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发明名称	STABILIZATION OF INSULATION FILM
摘要
申请公布号	JPH02109338(A)	申请公布日期	1990.04.23
申请号	JP19880261952	申请日期	1988.10.18
申请人	FUJITSU LTD	发明人	OZAWA KIYOSHI
分类号	C23C16/34;C23C16/40;C23C16/56;H01L21/316	主分类号	C23C16/34
代理机构		代理人
主权项
地址

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