| 摘要 |
PURPOSE:To visually detect the positional deviation of a beam spot and to clearly discriminate its cause by arranging an optical axis position detecting means in the transmission optical path of a laser beam and displaying the position of an optical axis according to its detected information. CONSTITUTION:A semiconductor two-dimensional position detecting element 10 as an optical axis position detecting means is set at the tip of the nozzle 6 of a working head 4. Its detected information is transformed by a processing circuit 11 to a signal corresponding to a two-dimensional position. A starting and a termination signal of the working head 4 are fetched to the processing circuit 11 and the two-dimensional position of the laser beam spot in this inter val is detected. By this method, the movement of the optical axis position of the laser beam 2 is caught in a real time to automatically indicate the locus of the optical axis position of the laser beam on a display 14 of an indicating part 12. In comparison with the locus pattern showing a focus position of the laser beam in the optical axis passing the central axis of the working head 4, the positional deviation state of the optical axis position of the position detected laser beam is caught visually to discriminate the state of a bend mirror 5. |
