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经营范围
发明名称
ION BEAM APPARATUS
摘要
申请公布号
JPH02109244(A)
申请公布日期
1990.04.20
申请号
JP19880261208
申请日期
1988.10.17
申请人
SONY CORP
发明人
KONISHI MORIKAZU;TAKIZAWA MASAAKI
分类号
H01J37/22;H01J37/04;H01J37/317
主分类号
H01J37/22
代理机构
代理人
主权项
地址
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