| 摘要 |
<p>PURPOSE:To improve the resistance temperature characteristic of an SnO2-TiO2 composite film by forming a composite metallic oxide of specific composition of Sn, Ti, Ta, and other elements and using said oxide as a film resistor. CONSTITUTION:A composite oxide of composition shown by the formula is formed by adding Ta and F to an SnO2-TiO2 film acting as a resistor and this oxide is used as a film resistor. In the formula, x, y, and z are the mole ratios of Ti, Ta, and F respectively determined to meet the requirement that the sum of the number of moles of Sn and Ti should be 1, and 1-x and w-z are the mole ratios of Sn and O respectively determined to meet the same requirement. Values for w, x, y, and z are real numbers satisfying inequalities 1.8<=w<=2.05, 0.1<=x<=0.7, 0.005<=y<=0.015, and 0.03<=z<=0.07. The mole ratios of Ti, Ta, and F are specified within specific ranges to obtain specific resistivity and resistance temperature coefficient.</p> |
