METHOD AND DEVICE FOR BONDING PELLET,申请号JP19880261108-传众专利搜索

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发明名称	METHOD AND DEVICE FOR BONDING PELLET
摘要
申请公布号	JPH02106938(A)	申请公布日期	1990.04.19
申请号	JP19880261108	申请日期	1988.10.17
申请人	HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD	发明人	UEMATSU SHUNEI;WADA TAKASHI;MIMATA TSUTOMU;ARIGA MAKOTO;OKABE TAKASHI;FUJISAWA KAZUHIRO
分类号	H01L21/52	主分类号	H01L21/52
代理机构		代理人
主权项
地址

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