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发明名称
MAKING OF THIN FILM SAMPLE
摘要
申请公布号
JPH02107942(A)
申请公布日期
1990.04.19
申请号
JP19880259385
申请日期
1988.10.17
申请人
TOSHIBA CORP
发明人
ICHIHARA KATSUTARO
分类号
G01N1/28
主分类号
G01N1/28
代理机构
代理人
主权项
地址
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