| 摘要 |
PURPOSE:To lengthen the lifetime of washing, and to improve a throughput by separating a washing tank into an inner tank and an outer tank, installing an electrode used for electrolyzing the washing to the inner tank and mounting a device employed for filtering the washing to the outer tank. CONSTITUTION:An inner tank 1 and an outer tank 2 are filled with a washing 3, a cassette 4 exclusive for washing is set to masks 5, and the cassette 4 is set into the inner tank 1 so that the masks 5 cross at right angles with opposed anode 6 and cathode 7. The anode 6 and cathode 7 having chemical resistance must be used. Currents are made to flow from a power supply 8, and electrolysis is conducted, thus activating the washing, then washing the masks 5. The washing in the inner tank is stirred by employing a magnetic stirrer, etc., the inside of the tank is equalized, and the washing is not detained on a washing surface. The washing in the outer tank 2 is passed through a piping 10 from a suction port 14, and forwarded to a filter 12 through a pump 11 and filtered. The filtered washing is returned to the inner tank 1 from an air plenum 15 through a piping 13. Accordingly, the washing overflows from the inner tank 1 to the outer tank 2, and operation is repeated regarding the washing in the outer tank. |
