| 摘要 |
<p>PURPOSE:To produce semiconductor chips having various patterns by using one kind of reticule by providing an aperture to a light shielding part for preventing double exposures enclosing the semiconductor chip forming region formed on a substrate. CONSTITUTION:The reticule provided with the aperture 4 to the light shielding part 3 for preventing double exposures enclosing the semiconductor chip forming region 2 provided to the central part of the substrate 1 is used. Connecting of the semiconductor chips to each other or cutting thereof is, therefore, possible according to whether the aperture 4 provided to the light shielding part 3 for preventing double exposures of this reticule is shielded by a light shielding blade of an exposing device or not. Changing of the constitution of the semiconductor chip patterns is possible as well. The semiconductor chips having various kinds of the semiconductor chip patterns are produced by using one kind of the reticule in this way.</p> |
