Sliding crucible for liquid-phase epitaxial growth

摘要

Sliding crucible for liquid-phase epitaxial growth having an upper part A, a middle part B and a lower part C for receiving the substrate, the upper part A having longitudinal chambers (5, 6) provided with holes (51, 61), through which holes middle intermediate chambers (52, 62) in the middle part B can be filled with melt solutions, so that, when sliding the substrate through in a recess (8) of the underpart C, a succession of thin semiconductor layers can be grown in alternating configuration. <IMAGE>