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经营范围
发明名称
PROCESS APPARATUS
摘要
申请公布号
JPH02105409(A)
申请公布日期
1990.04.18
申请号
JP19880256973
申请日期
1988.10.14
申请人
NEC CORP
发明人
UESUGI FUMIHIKO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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