VERFAHREN ZUR HERSTELLUNG VON STARREN FORMAETZTEILEN,申请号DD19880322990-传众专利搜索

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发明名称	VERFAHREN ZUR HERSTELLUNG VON STARREN FORMAETZTEILEN
摘要
申请公布号	DD278005(A1)	申请公布日期	1990.04.18
申请号	DD19880322990	申请日期	1988.12.12
申请人	VEB HALBLEITERWERK,DD	发明人	HEMMERLING,GERHARD,DD;ERNST,SIEGFRIED,DD
分类号	H01L21/48;(IPC1-7):H01L21/48	主分类号	H01L21/48
代理机构		代理人
主权项
地址

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