| 摘要 |
PURPOSE:To prevent a signal power-supply wiring part from being disconnected when corrosion progresses by a method wherein an uppermost-Iayer wiring layer of a multilayer structure is not connected directly to a bonding pad on the same layer but is connected to a bonding pad at a lower-layer wiring layer. CONSTITUTION:A second-layer wiring part is connected to a bonding pad 109 formed in a first-layer wiring layer. A second-layer signal power-supply wiring part connected to a bonding pad in a first layer via a through hole made in an interlayer insulating film 104 near the bonding pad 109; even when aluminum in this part is corroded, the wiring layer is not disconnected. |
