发明名称 SORTING OF LIGHT-EMITTING DIODE ARRAY
摘要 PURPOSE:To execute an automatic sorting operation by a method wherein a junction capacity of a P-N diode forming a light-emitting region is measured, a mean value in each chip is found from measured values of individual light-emitting regions and this array is judged and sorted from the mean value on the basis of whether a junction capacity value of each light-emitting region is within a permissible range. CONSTITUTION:It is supposed that the number of light-emitting regions per chip of a light-emitting diode array is 64 pieces. The light-emitting diode array in a wafer state is connected electrically by using an automatic prober 11. A reverse bias of about 5 V is applied to a P-N diode forming each light-emitting region; a measured value Ci of a junction capacity (where i=1, 2,..., 64) between an anode and a cathode is measured by using an automatic capacity measuring instrument 12. The Ci of the P-N diode is directly proportional to a diffusion junction area of the P-N diode; accordingly, it can be thought that the diffusion junction area in 32nd, 33rd and 34th light- emitting regions in the figure is large as compared with that of other light-emitting regions. The Ci of 64 pieces is sent to a computer 13 for processing use via a data line 14; a mean value Ci' of the data and (1+ or -d) Ci' to be used as a judgment standard are computed. After that, it is judged whether the Ci of the 64 pieces is within the standard or not.
申请公布号 JPH02105439(A) 申请公布日期 1990.04.18
申请号 JP19880258687 申请日期 1988.10.13
申请人 NEC CORP 发明人 HORI ATSUO
分类号 B07C5/08;H01L21/66;H01L33/08;H01L33/30;H01L33/40 主分类号 B07C5/08
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