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发明名称
VAPOR PHASE REACTION DEPOSITING METHOD WITH LASER BEAM UTILIZED THERETO
摘要
申请公布号
JPH02104668(A)
申请公布日期
1990.04.17
申请号
JP19880257961
申请日期
1988.10.12
申请人
SUMITOMO METAL IND LTD
发明人
TAKASO MASASHI
分类号
C30B25/02;C23C16/48
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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