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发明名称
VAPOR GROWTH DEVICE
摘要
申请公布号
JPH02103928(A)
申请公布日期
1990.04.17
申请号
JP19880255789
申请日期
1988.10.13
申请人
TOSHIBA CERAMICS CO LTD
发明人
TANAKA HAJIME;OKI AKIJI
分类号
H01L21/205;C23C16/44;C23C16/458;C30B25/12;H01L21/31
主分类号
H01L21/205
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代理人
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