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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02103954(A)
申请公布日期
1990.04.17
申请号
JP19880257991
申请日期
1988.10.13
申请人
SEIKO INSTR INC
发明人
NAKANO KENJI
分类号
H01L23/522;H01L21/318;H01L21/336;H01L21/768;H01L29/78
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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