METHOD AND DEVICE FOR ALIGNING FOR EXPOSURE,申请号JP19880254395-传众专利搜索

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发明名称	METHOD AND DEVICE FOR ALIGNING FOR EXPOSURE
摘要
申请公布号	JPH02102402(A)	申请公布日期	1990.04.16
申请号	JP19880254395	申请日期	1988.10.07
申请人	KONICA CORP	发明人	NISHI SHINICHI
分类号	G01B11/00;G03F9/00;H01L21/027;H01L21/30	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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