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发明名称
EXPOSURE DEVICE
摘要
申请公布号
JPH02101730(A)
申请公布日期
1990.04.13
申请号
JP19880255114
申请日期
1988.10.11
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
SASAKO MASARU;ENDO MASATAKA;NAKAGAWA HIDEO;NOMURA NOBORU
分类号
G03F7/20;H01L21/027;H01L21/30;H01S3/106;H01S3/137
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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