摘要 |
PURPOSE:To enable a plurality of energy analysis simultaneously with a significant improvement in energy resolving power by keeping a slit plate on the outlet side among two slit plates at a potential distribution roughly equal to that of an electrostatic field. CONSTITUTION:Voltage sources 25 and 26 of an element 21 apply a voltage to a conducting material layer 24 so that a surface potential distribution of a slit plate 20 on the outlet side becomes equal to that of an electrostatic field P. Then, when a voltage is applied across both ends of the conducting material layer 24 with the voltage sources 25 and 26, with an electric resistance of the conducting material layer 24, a surface potential of the conducting material layer 24, that is, the slit plate 20 on the outlet side changes straight horizontally. Therefore, when an energy analysis with +V applied to an internal electrode 2 and -V to an external electrode 2, an output voltage of the voltage source 25 is set at +V while the voltage source 26 at -V. This allows the surface potential distribution of the slit plate 20 on the outlet side to coincide with a spatial potential distribution between the internal electrode 2 and the external electrode 3, thereby achieving a significant improvement in energy resolving power. |