发明名称 MANOMETER MED ABSOLUT KAPASITANS.
摘要 The present invention refers to a capacitive pressure transducer unit, in which a measured capacitance changes according to pressure changes, which causes bending in an electrode. This pressure transducer unit has been produced to characterize an extensive pressure range that extends from almost vacuum to atmospheric pressure levels, by means of a composite electrode capsule 19A, 19C, 18 which cooperates in a unique way with the metal plate membrane 9 of the conventional type. When a relatively low pressure is measured, the capacitance exhibited by the transducer is essentially the capacitance that occurs between membrane 9 and one of the capsules situated near electrode 19C, but at atmospheric pressure or in the vicinity of it membrane 9 physically touches and bends the electrode 19C, which elastically changes shape, and changes an additional capacitance that occurs between the electrode that change shape 19A and another stationary electrode 18 which also represents a part of a capsule. <IMAGE>
申请公布号 FI884644(A) 申请公布日期 1990.04.11
申请号 FI19880004644 申请日期 1988.10.10
申请人 MKS INSTRUMENTS, INC. 发明人 BENSON, RICHARD A.;DENNER, JOHN A.
分类号 G01L;G01L9/12;(IPC1-7):G01L/ 主分类号 G01L
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