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发明名称
LIQUID METAL ION SOURCE
摘要
申请公布号
EP0248914(B1)
申请公布日期
1990.04.11
申请号
EP19870903539
申请日期
1986.12.05
申请人
HITACHI, LTD.
发明人
UMEMURA, KAORU;ISHITANI, TOHRU;AIDA, TOSHIYUKI;TAMURA, HIFUMI
分类号
H01J37/08;H01J1/02;H01J27/26
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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