| 摘要 |
PURPOSE:To prevent the oxidation and the corrosion of an Al wiring, etc., provided on the surface of an acceleration detecting element by sealing up tightly the acceleration detecting element by a package and filling an internal space with inert gas, or forming it to a vacuum state. CONSTITUTION:On a substrate 12, a cover body 14 is provided so as to cover an acceleration detecting element 10, an internal space S sealed up tightly by a package 15 constituted of the substrate 12 and the cover body 14 is filled with inert gas, or air in the internal space S of the package 15 is removed and it becomes a vacuum state. In such a way, the acceleration detecting element 10 is cut off entirely from an atmosphere of the periphery, an Al wiring, etc., provided on the surface are prevented from the oxidation and the corrosion, and the detection characteristic is maintained satisfactorily extending over a long period. |
