| 摘要 |
PURPOSE:To form protecting films free from defects such as creases by the effective utilization of the effects of both glow discharge and heating by disposing a glow discharge electrode serving also as a radiation heat source and a reflection plate in a vacuum vessel by facing a substrate to be treated. CONSTITUTION:A substrate such as a thin metallic strip or polyester film is conveyed by using a rotary can or the like in a vacuum vessel and is vapor-deposited thereon with a ferromagnetic layer or the like. A glow discharge electrode 15 serving also as a radiation heat source 14 and a reflection plate is disposed in proximity to said rotary can or the like by facing the circumferential side surface thereof. By said reflection plate, the radiation energy of the source 14 is absorbed effectively on the surface to be treated of the substrate. Thus, after a ferromagnetic layer or the like is formed on the substrate, a protective film of superior characteristics is easily formed thereon. This device is usable for a wide range of applications not only in the field of magnetic tapes. |
