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经营范围
发明名称
METHOD OF AND APPARATUS FOR MEASURING FILM THICKNESS
摘要
申请公布号
EP0358936(A3)
申请公布日期
1990.04.11
申请号
EP19890114556
申请日期
1989.08.07
申请人
DAINIPPON SCREEN MFG. CO., LTD.
发明人
KONDO, NORIYUKI DAINIPPON SCREEN MFG. CO., LTD.
分类号
G01B11/06;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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