Selective laser pyrolysis of metallo-organics as a method of forming patterned thin film superconductors

摘要

Fine line superconductors of yttrium-barium-copper were formed on <100> strontium titanate substrates by the completely non-vacuum techniques of metallo-organic deposition in selective laser pyrolysis. Lines 125 micrometers wide were written in a film of metal neodecanoates, using an argon laser, prior to complete pyrolysis. An organic dye which absorbs selective laser light wavelengths, is added to the metallo-organic solution comprising the metal neodecanoates prior to laser exposure, so as to enhance absorption of the laser light at the regions of the metallo-organic film which are subsequently exposed to the laser light. The increased light absorbance at the exposed regions, results in at least partial pyrolysis of the exposed metal neodecanoates. Regions of the metallo-organic film not exposed to laser pyrolysis is developed away using a xylene wash. Subsequent complete pyrolysis of the metal neodecanoates and rapid thermal annealing produced lines having superconducting onsets above 90 K and zero resistance at 40 K.