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发明名称
Capping layer for recrystallization process
摘要
申请公布号
US4915772(A)
申请公布日期
1990.04.10
申请号
US19860913998
申请日期
1986.10.01
申请人
CORNING INCORPORATED
发明人
FEHLNER, FRANCIS P.;MILLER, ROGER A.;WHITMAN, ARTHUR J.
分类号
B32B9/00;B32B5/18;B32B7/02;B32B15/04;H01L21/20;H01L21/263;H01L21/268
主分类号
B32B9/00
代理机构
代理人
主权项
地址
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