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经营范围
发明名称
IMPROVED PLANARIZATION PROCESS.
摘要
申请公布号
EP0346423(A4)
申请公布日期
1990.04.10
申请号
EP19890900518
申请日期
1988.11.18
申请人
LSI LOGIC CORPORATION
发明人
PATRICK, ROGER
分类号
H01L21/302;H01L21/3065;H01L21/3205;H01L21/768
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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