发明名称 MOS field effect transistor device with buried channel
摘要 The present invention relates to a semiconductor device comprising a semiconductor substrate of a first conductivity type or an insulator, a source comprising an impurity layer of a second conductivity type disposed on said semiconductor substrate or said insulator, a drain comprising an impurity layer of the second conductivity type disposed on said semiconductor substrate or said insulator, an impurity layer of the first conductivity type formed between said source and said drain, a gate formed on said impurity layer of the first conductivity type via an insulation film, and an impurity layer of the second conductivity type having an impurity concentration lower than that of said source and said drain, said impurity layer of the second conductivity type being disposed between said source, said drain and said impurity layer of the first conductivity type, and said semiconductor substrate of the first conductivity type or said insulator.
申请公布号 US4916500(A) 申请公布日期 1990.04.10
申请号 US19870078987 申请日期 1987.07.29
申请人 HITACHI, LTD. 发明人 YAZAWA, YOSHIAKI;WATANABE, ATSUO;HIRAISHI, ATSUSHI;MINAMI, MASATAKA;NAGANO, TAKAHIRO
分类号 H01L29/10;H01L29/78;H01L29/786;H01L29/808 主分类号 H01L29/10
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