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发明名称
摘要
申请公布号
JPH0250953(U)
申请公布日期
1990.04.10
申请号
JP19880128884U
申请日期
1988.09.30
申请人
发明人
分类号
H01J37/20;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/20
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代理人
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