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发明名称
FILM CARRIER
摘要
申请公布号
JPH0298153(A)
申请公布日期
1990.04.10
申请号
JP19880250636
申请日期
1988.10.04
申请人
NEC CORP
发明人
MASAKADO MINORU
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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