发明名称 |
Integrated circuits including photo-optical devices and pressure transducers and method of fabrication |
摘要 |
Integrated circuits are formed by bonding two substrates together on a moat or recess. If the moat is exposed at a side wall, an optical fiber is inserted therein and communicates optically with a photoelectric device in the substrate by a slant side wall of the moat. If the moat is sealed by a cover layer resulting from removing all or most of the top substrate leaving the bonding layer as a cover, a pressure responsive device is formed on the cover layer directly or in the remaining top substrate over the sealed cavity.
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申请公布号 |
US4916497(A) |
申请公布日期 |
1990.04.10 |
申请号 |
US19880195273 |
申请日期 |
1988.05.18 |
申请人 |
HARRIS CORPORATION |
发明人 |
GAUL, STEPHEN J.;MCLACHLAN, CRAIG J. |
分类号 |
G01L9/00;G02B6/42 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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