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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE AND VAPOR GROWTH DEVICE USED FOR IT
摘要
申请公布号
JPH0296324(A)
申请公布日期
1990.04.09
申请号
JP19880248311
申请日期
1988.09.30
申请人
FUJITSU LTD
发明人
YAMAZAKI SUSUMU
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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