| 摘要 |
PURPOSE:To improve the quality of damping in a thrust direction and heighten the quality of bearing rigidity, by making a construction in which changeover from a perfect static pressure guide state to a semi-floating slide guide state is made when the vibration of a movement body by means of a load has become more than a set value. CONSTITUTION:A changeover solenoid valve 16 is also connected with a high pressure depressurizing valve 12. And a vibration sensor 19 is provided at a table 1, and the changeover solenoid valve 16 is arranged to be controlled by means of a controller 20, on the basis of a set value V1 indicating the range of a perfect floating static pressure state decided previously by the vibration test of the table 1 and a set value V2 indicating the limitation of the suspension of cutting as vibration is severe. And, when the output of the vibration sensor 19 has become the magnitude between the 1st set value V1 and the 2nd set value V2, the controller 20 changes the changeover valve 16 and makes the supply of high pressure oil the supply of low pressure oil and makes the up and down direction perfect shaped static pressure guide a semi-floating slide guide. |
